The ultrasonic composite electrolytic machining system that can be used for precision machining of piezoelectric devices was designed.The electrodes were made by using a combination of electric machining techniques.The parametrically model of ultrasonic vibration systems was analyed by using ANSYS software, and its multiphysics coupling function was used for dynamic analysis. The parameters of the vibration characteristics of the ultrasonic system were obtained, and the vibration characteristic parameters were detected using a laser micro-displacement sensor to verify the correctness and reliability of the ultrasonic vibration system design and the ANSYS model analysis. Microstructure ultra-sonic machining tests were conducted, and ultrasonic and its composite electrolysis combined processing methods were used to achieve high-precision, high-efficiency, low-cost batch processing of surface-coated piezoelectric devices, demonstrating the feasibility and technical advantages of this method.

piezoelectric devices；ultrasonic composite machining；ANSYS analysis；combined machining