YANG Dalin, BIAN Da, ZHAO Zhian, NI Zifeng, ZHAO Yongwu*
(School of Mechanical Engineering, Jiangnan University, Wuxi 214122, Jiangsu, China)
Abstract:
A series of alkaline polishing slurry were used to investigate the effects of corrosion inhibitor,sodium dodecyl benzene sulfonate(SDBS), on Mg alloy. Corrosion test, electrochemical analysis and abrasive article size test were used to study the inhibiting-mechanism of SDBS. The results showed that, SDBS strongly inhibited the corrosion of Mg alloy in polishing slurry. The inhibition efficiency of 1.0% SDBS was more than 91%.SDBS was absorbed on the Mg alloy surface and then formed a protective film by condensation reaction. The protective film decrease the surface roughness, and also increase the friction coefficient in the polishing process. SDBS could be absorbed by Al2O3 polishing particles,which could inhibit the aggregation of particles. Al2O3 abrasive particle agglomeration is suppressed to reduce the scratches in the polishing process when SDBS content is of 1.0%.
KeyWords:
chemical mechanical polishing; corrosion inhibitor; polarization curve; removal rate; roughness
